一种适合射频功率放大器应用的图形化SOI LDMOSFET新结构

设计并制备了一种新颖的在栅下开硅窗口的图形化SOI LDMOSFET.该器件具有良好的直流和射频特性：输出曲线平滑,没有明显翘曲(kink)效应;静态击穿电压为13V;在栅漏偏压为3.6V时,截至频率为6GHz.负载牵引测试表明,该器件在1.5GHz时,PAE为50%,输出功率为27dBm,表明该器件适合射频功率放大器的应用.

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