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8.0 Implant

Implant介绍

Semiconductor Processing Overview, Rev_O

离子注入工艺 当你学完本章时,你应掌握以下内容: 1. 了解离子注入工序的目的. 2. 了解在离子注入工艺程序中的三个关键的参数且 了解其所指的是什么. 3. 了解离子注入设备中的七个基本部分.

M

Semiconductor Products Sector SPS Order Fulfillment Organization

Motorola Confidential Proprietary

Page 8.1

8.0 Implant

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